<p>➀ SMIC is testing a domestically developed immersion DUV lithography tool by Shanghai-based Yuliangsheng, aiming for production readiness in at least two years;</p><p>➁ Yuliangsheng, a subsidiary of Shenzhen's Si Carrier, is also working on an EUV machine codenamed 'Mount Everest';</p><p>➂ China’s DUV efforts include SMEE’s 28nm-capable system and existing ASML machines purchased before U.S. export restrictions.</p>