12/19/2024, 06:28 AM UTC
Rapidus获得EUV设备Rapidus gets EUV machine
➀ Rapidus已收到一台ASML EUV设备，用于其位于北海道千岁市IIM-1晶圆厂的建设；➁ 这标志着EUV技术在日本首次用于量产；➂ 该TWINSCAN NXE:3800E设备每小时可加工220片晶圆；➃ Rapidus计划在2025年4月开始在IIM-1进行试点硅片生产，采用单片晶圆工艺。➀ Rapidus has received an ASML EUV machine for installation at its IIM-1 foundry in Chitose, Hokkaido; ➁ This marks the first time EUV technology will be used for mass production in Japan; ➂ The TWINSCAN NXE:3800E machine can process 220 wafers an hour; ➃ Rapidus plans to start pilot silicon production at IIM-1 in April 2025 with a single-wafer process.---
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