06/03/2025, 07:00 AM UTC
创新型多功能空间光调制器评估平台成功开发Successful Development of Innovative and Versatile Evaluation Platform for Spatial Light Modulators
➀ 弗劳恩霍夫IPMS推出全新空间光调制器(SLM)评估套件,支持倾斜或活塞微镜技术,可逐像素调控光场,用于光刻、医疗和量子计算等领域;
➁ 套件覆盖紫外至近红外光谱,支持千赫兹级调制频率和纳米级校准精度,未来将扩展至深紫外范围以提升成像分辨率;
➂ 应用场景包括半导体光刻掩模写入、3D全息显示、天文自适应光学及量子计算光阱生成,相关成果将于2025年激光光子展亮相。
➀ Fraunhofer IPMS introduces advanced evaluation kits for spatial light modulators (SLMs) with tilting/piston mirrors, enabling pixel-level light manipulation for lithography, medical tech, and quantum computing;
➁ The kits support UV to near-infrared spectral ranges, high modulation frequencies (kHz), and nano-scale calibration, with plans to expand to deep UV for higher precision;
➂ Applications include semiconductor microlithography, 3D holography displays, adaptive optics, and quantum computing, showcased at Laser World of Photonics 2025.
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