02/23/2025, 08:51 PM UTC
泛林集团发布新型钼沉积机ALTUS HaloLam Research molybdenum deposition machine ALTUS Halo
泛林集团推出了一款名为ALTUS Halo的原子层沉积（ALD）机器，该机器采用钼材料。根据泛林集团董事Tae-Soon Park在Semicon Korea期间的新闻发布会上所说，与钨相比，使用钼可以降低50%的电阻，从而加快应用速度。
Lam Research has introduced an atomic layer deposition (ALD) machine named ALTUS Halo, which utilizes molybdenum. The use of molybdenum in this machine reduces resistance by 50% compared to tungsten, ultimately accelerating application speed, according to Tae-Soon Park, Director of Lam Research, during a press conference at Semicon Korea.
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