08/16/2024, 06:23 AM UTC
创新密封策略提升压电MEMS扬声器性能Innovative Sealing Strategy Enhances Piezoelectric MEMS Speaker Performance
➀ 研究提出了一种基于毛细效应的密封策略，解决压电MEMS扬声器中的空气泄漏和异步振动问题。➁ 该方法利用PDMS液体自主密封扬声器结构中的狭缝，改善低频和共振频率的声压级。➂ 密封后的扬声器在20 Hz处声压级增加了4.9 dB，共振频率附近改善了17.5 dB，对其他频率性能影响最小。➀ The study introduces a capillary effect-based sealing strategy to address air leakage and asynchronous vibration issues in piezoelectric MEMS speakers. ➁ This method uses PDMS liquid to autonomously seal the narrow gaps in the speaker structure, improving low-frequency and resonant frequency sound pressure levels. ➂ The sealed speakers showed a 4.9 dB increase in sound pressure level at 20 Hz and a 17.5 dB improvement around the resonant frequency, with minimal impact on other frequency performance.
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