08/16/2024, 10:37 AM UTC
高效能：日本四镜EUV装置难以掀起波澜Superior Efficiency: Japanese Four-Mirror EUV Setup Unlikely to Make Waves
➀ 日本工程师Tsumoru Shintake开发了一种四 镜EUV系统，其效率超过当前ASML扫描仪的十倍以上。➁ 该设计将镜片数量从十个减少到四个，减少了92%的EUV光源生成功率，并降低了制造和维护成本。➂ 尽管效率高，但由于分辨率降低和视野尺寸减小，ASML和Zeiss认为该装置不太可能被商业采用。➀ Japanese engineer Tsumoru Shintake has developed a four-mirror EUV system that is over ten times more efficient than current ASML scanners. ➁ The design reduces the number of mirrors from ten to four, cutting EUV light generation power by 92% and lowering manufacturing and maintenance costs. ➂ Despite its efficiency, the setup is unlikely to be commercially adopted due to reduced resolution and smaller field size, according to ASML and Zeiss.
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