05/01/2025, 06:45 AM UTC
前ASML科学家林楠引领中国EUV突破Former ASML Head Scientist Lin Nan Leads China's EUV Breakthrough
➀ 中国研究人员开发了一种在国际上具有竞争力的EUV光源平台，这是国内先进芯片生产的突破性进展；
➁ 由林楠领导的团队使用固态激光驱动方法在光刻研究中取得了世界级成果；
➂ 基于固态激光的平台，其转换效率已达到商用CO2激光驱动光源的一半以上，超过了之前的国际基准。
➀ Chinese researchers have developed an EUV light source platform that operates at internationally competitive parameters, a breakthrough for the domestic production of advanced chips;
➁ The team, led by Lin Nan, has achieved world-class results in photolithography research using a solid-state laser-driven approach;
➂ The platform, based on a solid-state laser, has reached more than half of the conversion efficiency rate of commercially available CO2 laser-driven light sources, surpassing previous international benchmarks.
---
本文由大语言模型（LLM）生成，旨在为读者提供半导体新闻内容的知识扩展（Beta）。
